多级化学媒介去除AMC，保护光刻设备与胶材。单机/联动洁净系统，有效脱除酸碱气体、VOC、硅氧烷、RC等各类分子污染物。
配套服务：定制方案、寿命测试、安装调试、运维培训。
二、 产品特点与优势
- 初始效率95%-99%，多级滤料抗高污染
- 自循环风机+实时监测，提前预警滤料失效
- 低阻节能，柜体无挥发，滤料寿命长
- 规格可定制，快拆维护少停机
I. Product Overview
This system utilizes multi-stage chemical media to remove Airborne Molecular Contaminants (AMC), protecting lithography equipment and photoresist materials. Available as standalone or integrated clean systems, it effectively eliminates various molecular contaminants, including acidic/alkaline gases, VOCs, siloxanes, and RC.
Supporting Services：Customized solutions, service life testing, installation and commissioning, and operation and maintenance (O&M) training.
II. Key Advantages
- High Efficiency:95%–99% initial efficiency with multi-stage filter media designed to handle high contamination loads.
- Intelligent Monitoring:Equipped with self-circulating fans and real-time monitoring to provide early warnings before filter media depletion.
- Energy Efficient & Clean:Low-resistance design for energy savings; the cabinet is non-outgassing (zero volatiles), ensuring a long filter media lifespan.
- Flexible & Maintainable:Customizable specifications with a quick-release design to minimize maintenance downtime.
|
柜体材质 |
不锈钢、钢板喷塑 |
运行环境 |
-10-50℃/《50%R.H. |
|
滤料类型 |
酸性 / 碱性 / VOC / RC专用滤料 |
控制方式 |
手动/PLC系统 |
|
风机配置 |
2000m3/h，功率700w，电压220v，频率50Hz; 1200m3/h，功率418w，电压220v，频率50Hz |
进出风连接 |
法兰、软管接口 |
- Materials and operating conditions
|
Item |
Specification |
Item |
Specification |
||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
|
Cabinet Material |
Stainless steel, Powder-coated steel plate |
Operating Environment |
-10°C to 50°C / < 50% R.H. |
||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
|
Filter Media |
Specialized media for Acids / Alkalis / VOCs / RC |
Control Mode |
Manual / PLC System |
||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
|
Fan |
Option 1: 2000 m³/h, 700W, 220V, 50Hz |
Air Inlet/Outlet Connection |
Flange, Flexible hose interface
|
四、型号及技术参数
|
POU专用过滤柜 |
移动式箱体 |
||||||||||||||||||||
|
外形尺寸 |
848×848×1783 mm |
1200×838×1842 mm |
|||||||||||||||||||
|
额定风量 |
2000 m3/h |
1200m3/h |
|||||||||||||||||||
|
初阻力 |
80–150 Pa |
220–300 Pa |
|||||||||||||||||||
|
配置 |
顶排风 / 底排风；带风机 / 无风机 |
微粒/化学滤芯多级串联、内置采样口 |
|||||||||||||||||||
|
适用 |
光刻机等敏感前置预过滤 |
局部高洁净环境、自发尘设备
备注：非标、大流量、防爆机型支持定制 |
|||||||||||||||||||
